Halocarbons 2316 / Hexafluorobutadiene
Halocarbons 2316 / Hexafluorobutadiene
Application
Halocarbon 2316 (C4F6) is mainly used for DRAM and Semiconductor industry for high aspect ration etching.
Product Specification
Purity 99.99%
Other Fluorocarbons < 400
N2+O2+Ar <50
CO2 <20
H2O <5 ppmw
Acidity (as HF) <5 ppmw
*Unit: ppm
龍鼎景觀工程:水車類.材質鋁合金.不銹鋼.仿木.適合打造農莊.景觀設計.款式多種.可以依客戶搭配流水