表面輪廓儀

• Available: Unbelievable low price in the market
• Customizable: Customized for your applications
• Passive isolation is integrated.

PERFORMANCE

Linear Scans

Yes

Scan Length Range

500μm(typically, 450μm minimum)

Data Points Per Scan

Up to 10,000 points

Vertical Range

15μm (typically, 13.5μm minimum)

Vertical Resolution

2Å (least significant bit)

Step Height Repeatability

1nm (1s on 0.1μm step) or 0.1%, whichever is larger

Scan Speed

1 - 100μm/sec

SYSTEM

Targeting Microscopic Camera

Fixed magnification,

8mm FOV [100X with 15in. Monitor]                     

Stylus Radius

5μm/ 2μm

Stylus Material

Diamond coated

Stylus Force

0.1 - 50mg

Sample Stage Dimension

70x70mm

Sample Stage Translation

Manual X/Y, 12mm x 12mm

Sample Thickness

10mm

Sample Weight

 50g

Computer System Requirement

CPU: 1GHz; RAM: 2GB; USB 2.0

Software

Scan control software on Windows XP or later                                                          Profile measurement software;                                           Report generator software;

Vibration Detection and Isolation

Embedded environment vibration detector                                                         

SOFTWARE

Step Analysis

Point-to-point, Avg. step height

Auto-Leveling

Yes

High Order Flatten

Yes

Roughness and Waviness Analysis

Ra, Rq, Rp, Rz, Ry, Rmax, Wa, Wq, Wp, Wz, Wy, Wmax

Filter

Moving average, Low pass, High pass

Raw Data Export

Yes

Scan Report Generator

Yes

FACILITY REQUIREMENTS

Power

100 - 240 VAC, 50/60Hz, 100W  

Weight

10kg

Temperature Range

25±2 °C

Humidity Range

70%, non-condensing