壓電奈米定位器
Including:
1.3-axis Nano-positioner (Model: NP-T-10)
2.High voltage amplifier (Model: E-T-10)
3-axis Nano-positioner (Model: NP-T-10) |
unit |
tolerance |
|
Active axis (axes) |
X/Y/Z |
|
|
Open-loop travel (X/Y/Z) |
10/10/10 |
mm |
+20% / -0% |
Open-loop resolution |
0.2 |
nm |
typ. |
Closed-loop travel |
- |
mm |
calibrated |
Closed-loop resolution |
- |
nm |
typ. |
電控配線配盤、拉線及電線配置安裝機台試車及調整、設備線路異常排除、出貨前拆線