RTP-RTN System
Description:
AST Cheetah RTP / RTA System provides the complete product line covering the productio
Description:
AST Cheetah RTP / RTA System provides the complete product line covering the production scale from volume production, pilot production to RD platform.
Cheetah RTP / RTA System has served Industry Application of worldwide customers from LED, LD, Solar Cell, Power Semiconductor, Compound Semiconductor, MEMS, Advanced Packaging, and Touch Panel.
1) Implant Annealing / Activation
2) Alloy
3) PSG/BPSG Reflow
4) Eutectic Reflow
5) Trench Oxidation
6) Gate Dielectric Formation
7) Poly –Si Annealing
8) Ti Silicide / Nitride
Features:
Cheetah series has system configuration for manual, semi, and fully auto system, suitable for different customer application.
Specification:
Standard Model for Manual, Semi-Auto, Fully-Auto, Single and Dual Chamber with Dual Robot Arm Available.
Please contact AST for your application.
Safety Approval:
TUV
Country of Original:
Taiwan
Main Export Markets:
Worldwide
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